| 摘要 |
PURPOSE:To simplify the structure of a flow rate sensor and decrease the number of components, and to detect a flow rate over a wide range with high accuracy by providing a partition plate where a through hole is formed to a conduit for fluid, and providing the partition plate with a pressure intake and a diaphragm. CONSTITUTION:The partition plate 13 which has the through hole 13 where the fluid passes is provided halfway in conduits 11 and 12 which guide the fluid. The partition plate 13 is provided with the pressure intake 13b through which the pressure of the fluid is applied ad the diaphragm 16 which has a strain gauge on the surface so that the intake is covered. The through hole 13a of the partition plate 13, therefore, operates as an orifice and the pressure intake 13b and diaphragm 16 constitute a pressure sensor. Thus, the orifice and pressure sensor are united, so the structure is simplified, the number of components is decreased, and the diameter of the through hole is selected to detect the flow rate over a wide range with high accuracy.
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