| 摘要 |
PURPOSE:To lessen a decrease in output and to improve wear resistance by sputtering Co, Cr and W on a substrate consisting of a high-polymer molding contg. carbon or metal carbide, thereby forming a Co-Cr-W-C alloy film thereon. CONSTITUTION:Co, Cr and W are sputtered by a composite target method on a perpendicular magnetic recording medium consisting of the Co-Cr-W-C alloy film is formed on the substrate consisting of the high-polymer molding contg. the carbon or metal carbide. The substrate surface receives the bombardment of atoms. during sputtering of the target and the carbon in the film is incorporated into the alloy film. The amt. of the metal carbide to be used is adequately 1-20wt.% by the weight of the high-polymer molding. The Co-Cr- W-C alloy film is composed of the compsn. contg. 50-84atom.% Co, 15-35atom.% Cr, 1-10atom.% W, and 0.1-5atom.% C.
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