| 摘要 |
PURPOSE:To realize the stable flow rate control by preparing plural function generators in the number accordant with the number of operated pumps and selecting a proper function generator in accordance with the number of operated pumps for execution of the flow rate control. CONSTITUTION:The (n) pieces of function generators 105 are connected in parallel to the output side of a flow rate controller 104 for use with a single pump, two pumps and then (n) pieces of pumps respectively. Then the (n) pieces of generators 105 are connected to a function selecting circuit 106 consisting of a function switch 107 and a bumpless switch 108. The switch 107 is connected with an operated pump number deciding circuit 109 which decides the number of operated pumps of a system and delivers a signal S109 to the switch 107. Thus, it is possible to always ensure the table flow rate control regardless the change of the number of operated pumps.
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