| 摘要 |
PURPOSE:To obtain an orientating laminated film providing a high-performance and inexpensive thin film condenser element, by successively forming a thin film of electrically conductive perovskite oxide having orientation properties in the crystal axis and an orientated thin film of perovskite analog oxide on a substrate having no orientation properties in the crystal axis. CONSTITUTION:A thin film of perovskite oxide ABO3 (A is La, Pr, Nd, Sm, Gd, Dy or Ho; B is Cr, Mn, Fe, Co or Ni) (e.g. compound shown by formula I or formula II; delta<=0.5) orientating in (001), showing electrical conductivity is formed on a substrate having no orientating properties in crystal axis by sputtering method. Then a (001) orientation thin film of perovskite analog oxide A3'B2'O7 (A' is Y, La, Ba or Sr; B' is Ti, Cu or Co) (e.g. Sr3Ti2O7) is formed on the thin film by sputtering method, etc., to give the aimed orientating laminated film.
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