| 摘要 |
PURPOSE:To perform accurate recognition by detecting the positive-directional and negative-directional peaks of a signal obtained by a matrix scan. CONSTITUTION:An electron beam EB makes a matrix scan on an etching character pattern MP on a sample SB, and a peak detecting means 71 detects the peak of the output SUB signal to set '1' in a flag means 72 for the positive direction or '0' in a flag means 73 for the negative direction according to the direction of the peak. A storing means 74 stores the state of the means 72 in addresses corresponding to the scanning position of a memory 8. When the scan is completed, data where '1' and '0' are distributed corresponding to the pattern MP are obtained in the memory 8 and a pattern recognizing means 75 recognizes the pattern MP from the distribution state. Consequently, the recognition is accurately performed. |
