发明名称 YTTRIUMOXIDKOMPOSITION FOER ANVAENDNING VID FOERAANGNING OCH FOERFARANDE FOER FRAMSTAELLNING AV ANTIREFLEXFILM DAERAV
摘要 Composition for use in evaporation as an optical anti-reflection film for compounds of III - V groups such as GaAs, Si and, more particularly, to an yttrium oxide composition for use in evaporation which contains titanium oxide and zirconium oxide. The invention also relates to a process for preparing the optical anti-reflection film using the yttrium oxide composition for use in evaporation. The invention can be utilized for temperature detecting device of a temperature sensor, laser diode, solar battery, etc. wherein optical fibers are incorporated.
申请公布号 SE8803506(D0) 申请公布日期 1988.10.03
申请号 SE19880003506 申请日期 1988.10.03
申请人 MITSUBISHI DENKI KK 发明人 S *TSUBOI;Y *MATSUSHITA
分类号 C04B35/622;C23C14/08;C23C14/24;H01L31/02;H01L31/0216;H01L33/44;(IPC1-7):B65H1/06 主分类号 C04B35/622
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