发明名称 SPUTTERING DEVICE
摘要 PURPOSE:To easily judge the service life of a target with precision in a short time by moving a distance detecting element in a target mounting plane in parallel within the plane, and detecting the distance between the element and the target surface. CONSTITUTION:A probe 3 as the distance detecting element is moved by a motor 10 through an arm 4 in the target mounting plane in parallel within the plane. When the distance from the surface of the target 1 is measured, a motor 14 is gradually rotated in the direction to loosen a wire rope 12, and the motor 14 is stopped at the moment when a touch sensor 16 fixed to the tip of the probe 3 is turned on. At this time, the angle of rotation of the motor 14 from its home position is detected by a rotary encoder 17, and the travel of the probe 3 (distance from target surface) can be obtained. By this method, the residual thickness of the target 1 and the erosion depth can be obtained, and the service life can be judged.
申请公布号 JPS63235470(A) 申请公布日期 1988.09.30
申请号 JP19870069750 申请日期 1987.03.24
申请人 NEC CORP 发明人 HIRAMATSU SHINICHI
分类号 C23C14/34 主分类号 C23C14/34
代理机构 代理人
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