摘要 |
PURPOSE:To make it possible to reduce the possibility of breakage due to micro-defects, by heating a grooved ceramic material under the atmosphere of unoxidation so as to remove internal stress. CONSTITUTION:The outer surface of a ceramic material formed thereon with a protective film is subjected to a grooving process by use of shot-blast. Thereafter, the removable of the protective film is carried out by a suitable process depending upon the kind of resin used therefor. After grooving by the shot-blast process, the ceramic plate is heated at a temperature of 1,000-1,800 deg.C. C under the atmosphere of unoxidation using such as argon, hydrogen or vacuum. Accordingly, a warp of the ceramic plate is corrected, and simultaneously, internal stress which is produced in the ceramic late during the grooving process may be also removed, thereby it is possible to reduce the possibility of breakage due to micro-defects.
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