| 摘要 |
PURPOSE:To narrow the width of a scribing line even when a monitor pad is formed in required size, and to improve productivity by constituting a monitor pad for a monitor as a protrusion into the allowance region of an integrated circuit chip from the scribing line. CONSTITUTION:In a semiconductor device having scribing lines 21, integrated circuit chips 22 partitioned by the scribing lines 21 and a monitor for inspecting characteristics inserted and formed onto the scribing lines 21 on a wafer, the monitor is organized as a device having monitor pads 23 shaped extending over the upper section of the allowance regions of the integrated circuit chips 22 from the upper sections of the scribing lines 21. Consequently, the monitor pads 23 can be constructed as wide ones without direct relationship with the scribing lines 21. Accordingly, the width of the scribing lines 21 can be narrowed, and productivity can be improved.
|
