| 摘要 |
PURPOSE:To detect reductive gas with high sensitivity, by forming opposed electrodes containing 30wt.% more of Pt to the surface of an insulating substrate composed of a ceramic and printing a paste containing an organometal compound between the opposed electrodes to form a gas responsive body. CONSTITUTION:For example, a thick film heat generator 2 composed of tungsten containing 30wt.% of more of platinum is provided to one surface of an insulting substrate composed of alumina and an insulator composed of alumina is provided thereon in a film form. Next, opposed electrodes 4 composed of the same material as the heat generator 2 are provided on the insulator 3 and a tin oxide type semiconductor 5 is formed thereon in a laminated film form. The semiconductor 5 is formed by the screen printing and thermal decomposition f a paste containing organometal oxide. By this constitution, reductive gas such as isobutane can be detected with high sensitivity.
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