| 摘要 |
PURPOSE:To prevent the occurrence of damage due to impact force and to increase bonding strength, by changing the compressing force of a bonder during the bonding period with an electropneumatic transducer. CONSTITUTION:A lead 13 of a film carrier 12 is positioned directly on a bump 11 of a pellet 10. Thereafter, a control signal SP at a voltage VO is outputted to an electropneumatic transducer 6 from a control device 7. Then compressed air, whose air pressure PO is proportional to the voltage VO of the inputted control signal SP, is supplied to an air cylinder 5 from a compressed air source 19. As a result, a bonding tool 4 is lowered in the direction of an arrow 16a. At first a contact body 14 is contacted with the lead 13 and the bump 11 with compressing force corresponding to the air pressure PO. Then the voltage value of the signal SP is changed into VB, which is larger than VO, is applied to the transducer 6 from the device 7. Then the compressed air is supplied into the air cylinder 5, and the compressing air is increased rapidly to the proper pressure. After the specified time, the application of the signal SP is stopped.
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