发明名称 METHOD OF DEBURRING SEMICONDUCTOR DEVICE AND DEVICE THEREFOR
摘要 PURPOSE:To contrive to lessen a remaining flash with good workability and as far as possible by a method wherein forced currents by a liquid, hard granular materials and bubbles are generated in a liquid to remove the flash on semiconductor devices. CONSTITUTION:Semiconductor devices 12 in a frame magazine 11 are conveyed by a belt conveyor 13 to be sent to a water tank 14. A mixture 16 of water and glass beads is housed in the tank 14, a high-pressure water injection nozzle 17 is provided over the tank 14 and forced currents 19 by the water, the glass beads and bubbles 18 are generated in the tank 14 as high-pressure water is injected. These forced currents strike on the devices 12 and a synthetic resin flash is peeled from the lead frames of the devices. As the devices are put in water in such a way and the high-pressure water is sprayed on the devices from the air over the tank, the grinding effect of the beads can be obtained and the flash is removed up to a degree near completion.
申请公布号 JPS63234537(A) 申请公布日期 1988.09.29
申请号 JP19870069906 申请日期 1987.03.24
申请人 TOSHIBA CORP 发明人 KUDO MASAHIDE
分类号 B29C45/17;B29C37/02;B29C45/00;H01L21/56;H01L23/50 主分类号 B29C45/17
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