| 摘要 |
PURPOSE:To manufacture a product having the desired quality with a good yield by providing a preceding chamber, which causes at least the carrier gas to stay and preliminarily heat it, on the side of raw gas and carrier gas introducing port. CONSTITUTION:A carrier gas is introduced into a preceding chamber 3 from an introducing tube 4 and the gas is caused to stray adequately and is preliminarily heated up to a desired temperature almost equal to the temperature of a processor 1. The preliminarily heated carrier gas is guided to the processor 1 after enhancement of line speed thereof by a fine connecting tube 2 and is properly mixed with the raw gas introduced from an introducing tube 5 at the mixing part A. In this case, the raw gas does not produce, even when it is mixed property with the carrier gas preliminarily heated up to the desired temperature, solid phase element such as fine powder in the different grain sizes, aerosol liquid phase element (liquid phase craster) or mixture of these elements and is mixed as the stable gas phase element.
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