发明名称 SEMICONDUCTOR MANUFACTURING APPARATUS
摘要 PURPOSE:To prevent deviation of a position at a positioning part, by providing a guide post and slits in a guide bush, causing elastic deformation at the time of coupling, and making reaction force to act so as to make a mutual clearance to be zero. CONSTITUTION:An aligning guide bush 6 has a flair shape. Slits 7 are provided at least at two or more places. The tip part of an aligning post 3 is inserted into the aligning guide bush 6 in an approximately concentric pattern. The flair part is elastically deformed at the tapered acting part in a bugle shape. The reaction force based on the elastic deformation is made to act so that the central axis of the aligning guide post 3 agrees with the central axis X-X of the aligning guide bush 6. Thus positioning and coupling are performed, and deviation in positions of a top force and a bottom force 5 is prevented.
申请公布号 JPS63233541(A) 申请公布日期 1988.09.29
申请号 JP19870069415 申请日期 1987.03.23
申请人 MITSUBISHI ELECTRIC CORP 发明人 AZUMA AKIYOSHI
分类号 B29C45/02;B29C45/80;H01L21/56 主分类号 B29C45/02
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