| 摘要 |
PURPOSE:To inspect a semiconductor on a substrate only by changing a plate for inspection even when the kinds of the substrates are altered by mounting the plate for inspection, an opening section of which is formed where corresponding to the semiconductor, a plate for setting the substrate and a pin block being detachably fitted to the opening section for the plate for inspection and having a probe for inspection. CONSTITUTION:A plate 13 for inspection, opening sections 14 of which are shaped where corresponding to semiconductors set up onto a substrate 11, a plate 12 for setting the substrate 11, locating pins 17 positioning the plate 13 for inspection to the substrate 11 set onto the plate 12 for setting the substrate, and pin blocks 15 being detachably fitted to the opening sections 14 for the plate 13 for inspection and having probes 16 for inspection are mounted. Accordingly, since the plate 13 for inspection, the opening sections 14 of which are shaped where corresponding to the semiconductors on the substrate 11, is used, the semiconductors on the substrate 1 can be inspected only by changing the plate for inspection even when the kinds of the substrates 11 alter.
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