| 摘要 |
PURPOSE:To facilitate controlling the radiation phase of an electron beam pulse with a high accuracy and analyze the internal operation of a super high speed device with a high accuracy by correcting the radiation phase in accordance with an energy analysis voltage value. CONSTITUTION:When an electron beam pulse 21 is transmitted through a blocking type energy analyzing means 17, it is accelerated or decelerated in accordance with an energy analysis voltage 24 applied to the means 17 and its radiation phase slips off. In this case, a radiation phase correction data 30 corresponding to the energy analysis voltage 24 is generated by referring to an energy analysis voltage-radiation phase correction data cross-reference table in a radiation phase correcting means 16 and the slippage of the radiation phase is corrected in a radiation phase controlling means 15. Therefore, the value of the radiation phase of the electron beam pulse 21 can be faithful to a phase signal instructed initially by a phase shifter 27 when the electron beam pulse 21 reaches an integrated circuit 19 to be tested. The radiation phase is corrected in the radiation phase controlling means 15 by converting the radiation phase correction data 30 from the radiation phase correcting means 16 into an analog signal through a DA converter and applying the analog signal to a radiation phase correcting electrode 28.
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