| 摘要 |
PURPOSE:To improve accuracy of alignment, by measuring the amount of shift of an original plate to a substrate in prescribed regions on the substrate and rejecting abnormal values from the measured ones and performing theta directional alignment of the substrate and next performing alignment of the original plate to the substrate in the respective regions. CONSTITUTION:The amount of position shift of an original plate RT to a substrate WF in prescribed regions on the substrate WF is measured by observing light which transmits a projection optical system LN and is reflected on or diffracted from marks on the substrate WF. Abnormal values are rejected from the measured ones, and theta directional alignment of the substrate WF is performed on the basis of the results of rejection. Thereafter, the alignment of the original plate RT to the substrate WF is performed in their respective regions. When the abnormal values are thus rejected, following alignment is performed on the basis of the measured values with high reliability as a result. Hence, the alignment of the original plate to the substrate can be performed with good accuracy. |
