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发明名称
A PROCESS FOR GENERATING A POSITIVE TONE PHOTORESIST
摘要
申请公布号
EP0229917(A3)
申请公布日期
1988.09.28
申请号
EP19860115997
申请日期
1986.11.18
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
FRECHET, JEAN M. J.;ITO, HIROSHI;MACDONALD, SCOTT ARTHUR;WILLSON, CARLTON GRANT
分类号
G03C5/00;G03F7/039;G03F7/26;G03F7/30;G03F7/36;G03F7/38;H01L21/027;(IPC1-7):G03F7/26;G03F7/10
主分类号
G03C5/00
代理机构
代理人
主权项
地址
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