| 摘要 |
PURPOSE:To improve accuracy of alignment, by measuring the amount of shift of an original plate to a substrate in prescribed regions on the substrate and performing theta directional alignment of the substrate on the basis of the results of measurement and next confirming theta correction in the measured regions or in the other regions. CONSTITUTION:The amount of position shift of an original plate RT to a substrate WF in prescribed regions on the substrate WF is measured by observing light which transmits a projection optical system LN and is reflected on or diffracted from marks on the substrate WF, and theta directional alignment of the substrate WF is performed on the basis of the results of measurement. Thereafter, measurement is performed again in the measured regions or in the other regions so as to confirm the alignment of the substrate WF, that is, theta correction. Hence, the alignment in the theta direction can be performed with good accuracy, and so observation is not required in global alignment and die.by.alignment of the following processes. |
