发明名称 POLISHING METHOD AND POLISHING TOOL
摘要 PURPOSE:To enable execution of polishing in a state to maintain surface shape precision, by a method wherein three rotary bodies are held to a single base body, and are brought into contact with three spots on a workpiece. CONSTITUTION:A recessed part to receive a small spherical body formed at the lower end of a motor rotary shaft 32a is formed in the central part of a disc-shaped base body 34a. The base body 34a is rotatable by the rotary shaft 32a in a state that one spot is substantially securely positioned. At least three spherical rotary bodies 34b, effecting a polishing action, are rotatably held in the under surface of the base body 34a, and the base body is brought into 3-point contact with the surface to be polished of a workpiece 60. With this state, the base body 34a is rotated and moved, and the spherical rotary bodies 34b are also moved as it is rotated and revolved. This constitution enables polishing of the workpiece in a state that surface shape precision of premachining on the workpiece can be sufficiently maintained.
申请公布号 JPS63232928(A) 申请公布日期 1988.09.28
申请号 JP19870062602 申请日期 1987.03.19
申请人 CANON INC 发明人 TAKASHITA JUNJI;NAKAMURA NOBUO
分类号 B24B13/00;B24B13/01 主分类号 B24B13/00
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