| 摘要 |
PURPOSE:To stably obtain a polishing amount of correction polishing for a fine part, by providing a measuring means for a polished surface, polishing amount determining means determining a polishing amount of the polished surface and its polishing position, arithmetic means calculating a turning speed in every turning angle of a workpiece, driving control means and a polishing means. CONSTITUTION:A polishing device presses a lap tape (tape-shaped polishing member) 39 to the polished surface of a workpiece 1 by a pressing member (nose) 38 to grind and polish the workpiece 1. And the device, removing the lap tape 39, measures the polished surface with the nose 38 serving as the measuring piece. Next the device, being based on a measured data of the polished surface, controls a relative position between the nose 38 and the workpiece 1 and their relative speed polishing the workpiece 1. Consequently, the device, in which a series of polishing work from measurement to polishing can be fully automatized, enables control operation to be substantially reduced. Simultaneously with the above, the device, in which a polishing tool and the workpiece 1 can be accurately controlled corresponding to a measured polishing amount and a polishing position, stably obtains a polishing amount of correction polishing for a fine part enabling higher accurate polishing to be performed.
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