| 摘要 |
PURPOSE:To control a depth of cut by a hard quality abrasive grain to a workpiece and to enhance polishing accuracy, by using a mixture, which mixes the hard quality abrasive grain serving as the polishing abrasive grain of a polishing agent in an elastic material particle or viscous elastic material particle, so as to limit a polishing load from being transmitted to the abrasive grain by deforming the elastic material particle. CONSTITUTION:Elastic material particle 3a and hard quality abrasive grains 3b are forced by a rotary polishing tool 4 to be press contact with the upper of a workpiece 1 in rotation. Here a polishing load crushes the elastic material particles 3a to be deformed, acting on the hard quality abrasive grains 3b. As the result, the workpiece 1 enables a depth of cut by the hard quality abrasive grains 3b to be controlled and accuracy of polishing to be enhanced further stable polishing to be attained over a long period. |
