| 摘要 |
PURPOSE:To improve accuracy of alignment, by automatically exchanging global alignment, in which alignment is performed in respective regions on a substrate, for die.by.alignment, in which alignment of an original plate to the substrate is performed in the respective regions on the substrate. CONSTITUTION:A global alignment mode, where alignment operations in respective regions on the substrate WF are performed serially on the basis of correction lattice information of coordinates or the like for indicating the positions of the respective regions arranged on the substrate WF, is exchanged for a die.by. alignment mode, where the amount of XY directional position shift of the respective regions is measured by observing light which transmits a projection optical system LN and is reflected on or diffracted from marks on the substrate WF, and alignment of the original plate RT to the substrate WF in the respective regions is performed on the basis of the results of measurement and the correction lattice information. Hence, alignment can be performed with good accuracy. |
