发明名称 DEVELOPMENT DEVICE
摘要 PURPOSE:To reduce and equalize the quantity of the decrease of a film in a nonexposure section of the photosensitive film by providing a holding section holding an article to be treated and a plurality of nozzles spraying a developer against the treated article held by the holding section. CONSTITUTION:A holding section 13 holding an article to be treated 12 and a plurality of nozzles 14a, 14b spraying a developer against the article to be treated 12 held to the holding section are provided. Since the quantity of the decrease of a film in a nonexposure section of a photosensitive film is increased with the rise of the hydraulic pressure of the developer sprayed from the nozzles, the developer is sprayed against the article to be treated 12 from a plurality of the nozzles 14a, 14b, a flow rate par one nozzle is diminished, and the hydraulic pressure of the developer is lowered while hydraulic pressure in a sprayed surface is equalized. Accordingly, the quantity of the decrease of the film in the nonexposure section of the photosensitive film can be reduced and made uniform.
申请公布号 JPS63232431(A) 申请公布日期 1988.09.28
申请号 JP19870066705 申请日期 1987.03.20
申请人 TOKYO ELECTRON LTD 发明人 HASEBE KEIZO
分类号 H01L21/30;G03F7/00;G03F7/30;H01L21/027 主分类号 H01L21/30
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