发明名称 POLISHING METHOD AND TOOL THEREFOR
摘要 PURPOSE:To aim at improvement in efficiency for polishing, by setting up a workpiece of an optical element or the like and a polishing tool with a magnetic field generating member both in a magnetic fluid solution in which abrasive grains are contained, and making the magnetic fluid solution collide with a work surface by their relative motion. CONSTITUTION:A polishing tool 12 is made up of tightly attaching a spherical body 16, consisting of a magnetic material, to the tip of a turning shaft 14 consisting a magnet or a magnetic body likewise, and it is set up in a magnetic fluid solution 22 containing abrasive grains together with a workpiece of an optical element or a die or the like. And, when the spherical body 16 is approached to a workpiece 20 while rotating the turning shaft 14, the ambient magnetic fluid solution 22 is dragged around, and this dragging effect is accelerated by magnetism of the spherical body 16 whereby it is given the necessary flow velocity, thus polishing is efficiently carried out with a collision of the abrasive grains against a polished surface by the dynamic pressure. Thus, forming capacity for a highly accurate surface form and very good surface roughness can be secured.
申请公布号 JPS63232950(A) 申请公布日期 1988.09.28
申请号 JP19870062611 申请日期 1987.03.19
申请人 CANON INC 发明人 ANDO MANABU
分类号 B24B13/01 主分类号 B24B13/01
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