| 摘要 |
PURPOSE:To detect the faithful secondary electron signal in response to the high speed pulse change of the sample voltage by providing a specific processing means and reducing the travel time difference of the secondary electrons generated from a sample between the sample and a charged particle detector. CONSTITUTION:Secondary electrons ea-ec traveling the distance from a sample Sp to a charged particle detector provided with a micro-channel plate MCP travel almost the same distance to the semi-spherical face of the energy filter Ef of an energy selecting means but travel different distances respectively between the filter Ef and the detector MCP. Delay elements da, db are provided between the detection section of the detector and the filter Ef, or the anode of the plate MCP is formed into a recessed shape, or a separate and independent control electrode ce is provided concentrically with the plate MCP, thereby the travel distances of secondary electrons are made almost the same to faithfully detect secondary electrons.
|
