| 摘要 |
PURPOSE:To improve the utilization efficiency of a material by flatly combining the plural target pieces consisting of the same material to form a sputtering target to exchange only the piece at the place with many thinned parts for a fresh one. CONSTITUTION:The sputtering target 5 is formed by a central discoid target piece 6 and the annular target piece 7 engaged on the outer edge of the piece 6, and both pieces 6 and 7 are produced by press-forming the same powdery material. At this time, the relative density of the discoid target piece 6 is made higher than that of the annular target piece 7, the porosity of the piece 6 is made lower than that of the piece 7, and the cooling efficiency of the discoid target piece 6 is made higher than that of the piece 7 when the target is fixed to a cooling plate 2 by a molten metal 3. When the target 5 is sputtered, only the specified part of the discoid target piece 6 is annularly damaged to a specified width, hence only the discoid target piece is exchanged for a fresh one, and the annular target piece 7 can be reused. |
