发明名称 VACUUM PUMP
摘要 PURPOSE:To prevent the occurrence of corrosion, by a method wherein a pump constituting part is formed by a metallic material where a metallic compound is deposited by applying heat treatment thereon, is covered by ceramic, and heat treatment is applied thereon. CONSTITUTION:A rotor 1, a moving vane 2, and stationary vane 3, a casing 4, and an exhaust pipe 8 are formed by using a stainless steel containing a metallic material on the surface of which TiC is segregated by applying heat treatment thereon. After the surface of each of them is covered with ceramic, heat treatment is applied. As a result, since TiC is deposited on an interface between the covering ceramic and the metal of a ground, the covering ceramic and the metal are joined together as if they are joined by means of TiC, resulting in increase of adhesive strength.
申请公布号 JPS63230989(A) 申请公布日期 1988.09.27
申请号 JP19870063838 申请日期 1987.03.20
申请人 HITACHI LTD 发明人 OTAKA KENJI
分类号 F04D7/06;F04D19/04 主分类号 F04D7/06
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