发明名称 Process for the production of an oriented monocrystalline silicon film with localized defects on an insulating support
摘要 This process consists of producing in the insulating support a periodic configuration which, in the form of regularly spaced parallel insulating strips, has overhanging and recessed parts, the width of the overhanging parts being smaller than that of the recessed parts; depositing on the complete structure obtained a silicon film; covering the silicon film with an encapsulating material layer; carrying out heat treatment in order to recrystallize the silicon film in monocrystalline form, said treatment consisting of locally melting the silicon film and displacing the melted zone parallel to the insulating strips, the melted zone being in the form of a line perpendicular to said strips, followed by the elimination of the encapsulating material layer.
申请公布号 US4773964(A) 申请公布日期 1988.09.27
申请号 US19860854385 申请日期 1986.04.21
申请人 HAOND, MICHEL 发明人 HAOND, MICHEL
分类号 H01L21/20;C30B13/34;H01L21/84;(IPC1-7):H01L21/306;B44C1/22;C03C15/00;C03C25/06 主分类号 H01L21/20
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