发明名称 TRANSISTOR CHANGED INTO INTEGRATED CIRCUIT
摘要 PURPOSE:To reduce a section flowing through the surface of a base layer of collector currents, to prevent an effect of a surface recombination and to improve the characteristics of an integrated circuit by forming an emitter layer and a collector layer in a recessed section formed in a base region. CONSTITUTION:An n<+> region 2 is formed to one part of the surface of a p type silicon board 1 through diffusion, and an n layer 3 is formed on the region 2 through an epitaxial method. The recessed sections 7, 8 are formed to the n layer 3 through etching, and the p type emitter layer 4 and the p type collector layer 5 are formed from the bottoms of the recessed sections through diffusion. A p type isolation layer 6 is formed separately through diffusion, and an n<+> layer 9 for a base electrode is also formed through diffusion. Surface currents reduce largely because collector currents flow as shown in the arrow 10. Consequently, the surface recombination does not contribute to hFE-IC characteristics, hFE does not lower in a low-current region, and hFE is represented in flat characteristics extending over a wide range of the IC. Accordingly, an amplification of little strain can be executed by the transistor, and even minute currents can be treated.
申请公布号 JPS59108350(A) 申请公布日期 1984.06.22
申请号 JP19820218754 申请日期 1982.12.14
申请人 FUJI DENKI SEIZO KK 发明人 KURODA EIJIYU
分类号 H01L21/8222;H01L21/331;H01L27/06;H01L29/72;H01L29/73 主分类号 H01L21/8222
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