发明名称 INSPECTING DEVICE FOR 2-DIMENSIONAL PATTERN
摘要 PURPOSE:To encode breaking and thickening, disconnection and T-shaped wiring, etc., after discriminating them by encoding the directivity and adding it in case measured length values are considerably different from each other between two radial directions different by 180 deg. from each other. CONSTITUTION:A binarized pattern 20 given from a memory circuit is inputted to a length measurement sensor 24 for measurement of length in 16 directions (a-r). Then a normalized measured length value 31 is inputted to a length measurement code producing part 32 via a measured length value normalizing circuit 30. An equalizing circuit 33 outputs the quantized measured length value 36 based on the threshold values Wa and Ws with which the measured length values are inputted independently of each of both radial directions different by 180 deg. from each other. While a measured length value 27 is inputted to a directivity deciding circuit 34 and symmetrical data 37 and directional data 38 are outputted in case the difference of the measured length values between said two radial direction is smaller and larger than the threshold value respectively. Then the value 36 given from the circuit 36 and both data 37 and 38 given from the circuit 34 are inputted to a coding circuit 35 and encoded to be outputted as a code output 21.
申请公布号 JPS63229571(A) 申请公布日期 1988.09.26
申请号 JP19870062469 申请日期 1987.03.19
申请人 FUJITSU LTD 发明人 TAKANO SADAO;IWATA SATOSHI;ANDO MORITOSHI
分类号 H01L21/66;G01N21/88;G06T1/00;H05K3/00 主分类号 H01L21/66
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