METHOD FOR ELECTRICALLY ISOLATING LARGE AREA ELECTRODE BODIES

摘要

Method for electrically isolating large area electrode bodies to facilitate cascade interconnection of semiconductor bodies which may be deposited afterwards includes applying a maskant in a preselected pattern onto a substrate, depositing a conformal layer of an electrically conductive electrode material atop the patterned maskant and removing the maskant and the electrode material deposited thereon by dissolving in a solvent which is substantially chemically inert with respect to subsequently deposited materials to expose at least portions of the substrate and electrically isolate the remaining portions of the electrode material so that selective electrical interconnections may be made between electrically isolated electrode portions. This method substantially eliminates the need for laser or mechanical scribing of semiconductor bodies on a large area substrate.