| 摘要 |
PURPOSE:To obtain a pulse laser having a long life, stable laser output and uniform beam pattern by forming the opening width of an opening in an optical axis direction 0.5-10mm. CONSTITUTION:In a pulsed laser having a discharge unit which has a first main electrode 1, a second main electrode 2 including a plurality of openings, and an auxiliary electrode 4 disposed through a dielectric element 3 on the second main electrode opposite to the electrode 1, the width of the opening in an optical axis direction is formed 0.5-10mm. Thus, the diameter and the pitch of the opening of the electrode are optimized to supply sufficient amount of seed electrodes to stabilize a main discharge 5 and to densely form the main discharge convergent part near the opening to uniformize the part corresponding to the laser beam pattern at the opening electrode side and to prevent a laser output from decreasing. Thus, the pulsed laser having a long life, a stable laser output and a uniform beam pattern can be obtained. |
