| 摘要 |
PURPOSE:To prolong the service life of electrodes, to establish uniformity in a long-period discharge, to suppress the laser gas in terms of its chemical reaction, and thereby to sustain a stable laser output by a method wherein a coolant is allowed to flow into the cathode or anode or both. CONSTITUTION:A cathode 1 and anode 2 are chamber-type electrodes, built of Al and provided with Ni coatings on their surfaces. A coolant 6 is let through empty chambers 5 included in the cathode 1 and anode 2 via intake jackets 3 and discharge jackets 4 for the cooling of the cathode 1 and anode 2. Repeated discharges through gas between the cathode 1 and anode 2 do not cause a rise in temperature because the heat generated in the cathode 1, the anode 2, and discharge region 7, is rapidly removed. The rate of etching by ion bombardment on the cathode 1 and anode 2 is slowed down, chemical reaction with a halogen gas is reduced, all contributing to the sustenance of a uniform discharge for a prolonged period of time. |
