| 摘要 |
PURPOSE:To improve the bonding strength and denseness of a film formed on a body to be processed by accelerating and neutralizing vapor ionized by an ionizing electrode and by colliding the vapor against the body. CONSTITUTION:An evaporating source 2 is evaporated by radiating electron beams from an electron gun 3. The resulting vapor is ionized by arc discharge caused between the source 2 and an ionizing electrode 6. The ionized vapor is accelerated toward a body 4 to be processed in an electric field applied by an accelerating electrode 7 and the accelerated ions are neutralized by thermoelectrons emitted from a thermoelectron emitting filament 8. The velocity of the ions is maintained even after the neutralization and the vapor collides against the body 4 at high velocity, forming a high quality film.
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