| 摘要 |
PURPOSE:To obtain an excellent junction surface wherein a transition layer is not formed at the time of forming a hetero junction, by providing a quartz tube constituting a CVD equipment with a non-reactive gas spouting nozzle oriented in a desired direction. CONSTITUTION:The quartz tube 1 of a metal organic CVD equipment is provided with a non-reactive gas spouting nozzle 2 to spray a non-reactive gas against a substrate region 6, which is rapidly covered with the non-reactive gas simultaneously with the reaction gas switching. Thereby the reaction is conpulsority interrupted to progress, and the formation of a transition layer on the growth layer of a substrate 4 is obstructed at the time of the gap switching. Accordingly, an excellent junction surface with no transition layer can be obtained at the time of forming a hetero junction.
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