| 摘要 |
PURPOSE:To simplify the pressure resistance design and to simplify the shape of the pressure vessel by providing an air duct connecting a discharge electrode section, cooler and blower in the pressure vessel. CONSTITUTION:A discharge electrode section formed with main electrodes 1, 2 and a preliminary ionization electrode 3, a cooler 4 and a blower 5 are connected by an air duct 6 and disposed within a pressure vessel 10, and a laser gas set to a pressure higher than or substantially equal to the pressure within the pressure vessel 10 is circulated in the air duct 6. Also, a capacitor 8 connected to the discharge electrode section, a motor for the blower, sheath wires etc. are disposed outside the air duct 6, whereby the noxious gas generated is prevented from flowing into the laser gas circulation system. |
