| 摘要 |
PURPOSE:To facilitate checking of washing degree, by performing washing by using a material, which has either of property emitting a large amount of scattered light or property emitting fluorescent light. CONSTITUTION:A transparent substrate 5 to be washed, which is enclosed in a container part 1, is positioned over a brush washing bath 2 through a path 6. In the inside of the brush washing bath 2, a pure water jetting parts 7, washing liquid jetting parts 8 and rotary brushes 11 are arranged so that they are partitioned with splash preventing plates 9 and 10. As the materials used for the brushes, the following materials are used: material, which can emit scattered light with respect to incident light when the material is made to be the brush; and a material, which emits intense fluorescent light when ultraviolet light is inputted. As such materials, nylon material is used. Or a inorganic material, which is optically transparent or semitransparent, and whose fracture shape tends to become spherical or polygonal shape and refractive index is n=1.1-3.0, is used. The fluorescentlight emitting material is mixed in washing agent beforehand or jetted at the same time with washing. Thus the washing remnant can be readily detected without the effects of pattern edges, stray light or the like.
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