| 摘要 |
PURPOSE:To make the thickness and compsn. of a film uniform by arranging chemically different plural unit targets to form a rod target for sputtering, relatively rotating the target at the center of a tubular base materials in the axial center and carrying out sputtering. CONSTITUTION:A rod target 5 for sputtering is formed by arranging chemically different plural unit targets 5a, 5b in the longitudinal direction so that they are insulated from each other. While the target 5 is relatively rotated at the center of a tubular base material 4 in the axial center, sputtering is carried out to form a film on the inside of the base material 4. |
