| 摘要 |
PURPOSE:To prevent an insulator breakdown discharge, always to provide a stable and efficient output, and to provide controllability in an output beam width by using a cylindrical tube as a dielectric or resistor for preliminarily discharging, forming a flat part at part of its outer side face, the flat part being in contact with a second main electrode, and providing an auxiliary electrode in the tube. CONSTITUTION:A dielectric 14 is made of a cylindrical tube having a flat part 15 at part of its outside face. The flat part 15 is contacted with a second main electrode 3, and an auxiliary electrode 5 is mounted in the tube. Thus, it can completely prevent an insulator breakdown between the electrodes 5 and 3. As a result, an always stable preliminary discharge 9 is obtained to attain a uniform main discharge. Since the electrode 5 is opposed to the electrode 3 in the shape in which the dielectric 14 is interposed therebetween, the width of generating a preliminarily ionized discharge 9 is controlled by regulating the diameter of the tube of the dielectric and the width of the flat part 15. Thus, the main discharge is not concentrated at the center of the electrode to efficiently obtain a laser beam of arbitrary width. |
