发明名称 AUTOMATIC WIRING APPARATUS FOR INTEGRATED CIRCUIT
摘要 PURPOSE:To satisfy a process rule and to decrease the number of viaholes at the same time, by retrieving a specified wiring pattern provided with specified conditions violating the process rule, and performing the replacement of wiring layers, connection between specified viaholes and shifting of one of the specified via boles with respect to the retrieved pattern. CONSTITUTION:A second wiring layer is replaced for a first wiring layer with respect to a wiring pattern, which is retrieved with a wiring-pattern retrieving means 3. A third viahole is shifted so that the distance between the first and third viaholes exceeds a specified distance. A wiring-pattern correcting means 4, by which the first and third viaholes are connected with the second wiring layer, is provided. A specified wiring pattern, which is provided with specified conditions violating a process rule, is retrieved. The third viahole is shifted so that the distance between the first and third viaholes exceeds the specified distance with respect to said retrieved pattern. At the same time when the second wiring layer is replaced for the first layer, the first and second viaholes become unnecessary. Since the first viahole is required at the later stage, only the second viahole is not necessary. Thus the number of the viaholes is decreased.
申请公布号 JPS63228643(A) 申请公布日期 1988.09.22
申请号 JP19870061128 申请日期 1987.03.18
申请人 FUJITSU LTD 发明人 KORENAGA HIROKI;KAWACHI KAZUYUKI
分类号 H01L21/3205;G06F17/50;H01L21/82;H01L21/822;H01L27/04 主分类号 H01L21/3205
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