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发明名称
摘要
申请公布号
DE3311635(C2)
申请公布日期
1988.09.22
申请号
DE19833311635
申请日期
1983.03.30
申请人
NIPPON TELEGRAPH AND TELEPHONE CORP., TOKIO/TOKYO, JP
发明人
KYURAGI, HAKARU, TOKOROZAWA, SAITAMA, JP;OIKAWA, HIDEO, KOGANEI, TOKIO/TOKYO, JP
分类号
H01L21/285;H01L21/768;H01L23/485;(IPC1-7):H01L21/60
主分类号
H01L21/285
代理机构
代理人
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