| 摘要 |
PURPOSE:To surely subject a solid body to prescribed surface treatment and to improve the accuracy of a product by setting the solid body in a specified gas and projecting ultrasonic waves to vanish a passive layer sticking to the solid body and to bring the gas into direct contact with the surface of the solid body. CONSTITUTION:A wafer 1 or the like is set on a setting jig 5 and a specified gas such as ozone is fed into casing 4, substd. for the air in the casing 4 and circulated. An ultrasonic vibrator 8 is then vibrated to project ultrasonic waves on the surface of the wafer 1. By the vibration energy of the ultrasonic waves, a passive layer bonded and adhered firmly to the surface of the wafer 1 is separated, stripped and vanished. The layer is made of a substance produced by a chemical reaction with air and ozone. The circulating ozone gradually comes in direct contact with the wafer 1 and impurities are dry-removed by the synergism of the ozone and UV passing through the casing 4. The purity of the circulating ozone is maintained by passing through a filter.
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