| 摘要 |
PURPOSE:To easily correct a difference between the pulse estimation values of a process side and a system side, by correcting the estimation value of a pulse corresponding to a process quantity by the bias value of a bias value setting means. CONSTITUTION:The pulse estimation value of a pulse estimating means 101 which estimates the pulse outputted corresponding to the process quantity is stored in an estimation data storage means 102. Meanwhile, an estimation data correcting means 104 corrects the estimation value of the estimation data storing means 102 only by the bias value of the bias value setting means 103, and a data processing is performed based on a corrected pulse estimation value. in such a way, only by setting a value just before when a file is set, for example, at a phi clear state, and the number of pulses during a time when it is impossible to count the pulse transiently respectively by the bias value setting means 103, it is possible to easily correct the difference of the pulse estimation values of the process side and the system side.
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