| 摘要 |
PURPOSE:To make a visual field shiftable without being conscious of each mechanical structure of sample stages with an image in observation as the center, by transmitting indication and information to an arithmetic processing part on the basis of operating conditions of a scanning electron microscope and indication and information to be inputted from the outside, and controlling a driving part. CONSTITUTION:In due consideration of a driving part, automatically performing action of each degree of freedom for parallel, rotating and tilting movements, etc., of sample stages 107-110, and mechanical positioning accuracy of each degree of freedom and incident position accuracy of an electron beam 103, and furthermore processing the image secured by scanning, there is provided with an arithmetic processing part 118 which indexes both relative and absolute scanning positions on a sample 111. And, using information on these accuracies and that on a multiplying factor, movements of each degree of freedom in these sample stages 107-110 are combined together, having them driven. With this constitution, an operator is able to select the desired visual field without being conscious of each mechanical structure of these sample stages 107-110.
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