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发明名称
ANNEALING METHOD BY IRRADIATION OF LIGHT BEAMS
摘要
申请公布号
EP0196082(A3)
申请公布日期
1988.09.21
申请号
EP19860104136
申请日期
1986.03.25
申请人
SONY CORPORATION
发明人
SUZUKI, TOSHIHARU;KASAHARA, JIRO;ARAI, MICHIO
分类号
H01L21/26;H01L21/268;H05B39/04;(IPC1-7):H01L21/324;H01L21/66;G05D23/27
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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