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发明名称
Preparation of a susceptor for use in the manufacture of semiconductor devices
摘要
申请公布号
GB1112016(A)
申请公布日期
1968.05.01
申请号
GB19660000276
申请日期
1966.01.04
申请人
STANDARD TELEPHONES AND CABLES LIMITED
发明人
SKINNER RAYMOND GEORGE
分类号
C23C16/32;C30B25/12
主分类号
C23C16/32
代理机构
代理人
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