发明名称 |
Electric transducer for measuring mechanical quantities |
摘要 |
An electric transducer for measuring mechanical quantities comprises a movable tongue which is acted upon by the mechanical quantity to be measured and the deflection of which is converted into an electrical signal. The tip of the tongue may be designed as the gate and an electric conduction channel disposed opposite the tip at a small distance therefrom may comprise the source-drain path of a field effect transistor, or vice versa.
|
申请公布号 |
US4772928(A) |
申请公布日期 |
1988.09.20 |
申请号 |
US19860855886 |
申请日期 |
1986.04.24 |
申请人 |
MESSERSCHMITT-BOELKOW-BLOHM GMBH |
发明人 |
DIETRICH, KLAUS;KROY, WALTER |
分类号 |
G01L1/18;G01P15/12;G01P15/13;H01L29/84;(IPC1-7):H01L29/84;H01L29/96 |
主分类号 |
G01L1/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|