发明名称 Electric transducer for measuring mechanical quantities
摘要 An electric transducer for measuring mechanical quantities comprises a movable tongue which is acted upon by the mechanical quantity to be measured and the deflection of which is converted into an electrical signal. The tip of the tongue may be designed as the gate and an electric conduction channel disposed opposite the tip at a small distance therefrom may comprise the source-drain path of a field effect transistor, or vice versa.
申请公布号 US4772928(A) 申请公布日期 1988.09.20
申请号 US19860855886 申请日期 1986.04.24
申请人 MESSERSCHMITT-BOELKOW-BLOHM GMBH 发明人 DIETRICH, KLAUS;KROY, WALTER
分类号 G01L1/18;G01P15/12;G01P15/13;H01L29/84;(IPC1-7):H01L29/84;H01L29/96 主分类号 G01L1/18
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