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摘要
申请公布号
JPS63142829(U)
申请公布日期
1988.09.20
申请号
JP19870036329U
申请日期
1987.03.11
申请人
发明人
分类号
H01L21/302;H01L21/205;H01L21/3065;H01L21/31;(IPC1-7):H01L21/302
主分类号
H01L21/302
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