| 摘要 |
PURPOSE:To hold an article holding its condition such that no dust adheres to surfaces of the article, by providing a fluid jetting part supplying low speed fluid which forms a fluid film between a holding surface and the held article. CONSTITUTION:A holding device, if pressurized gas is supplied to a pipe 5A, floats a held object 1 on a holding surface 2A by the action of floating gas jetting parts 3A. And the device, if pressurized gas is supplied to a pipe 5B, holds the held object 1 in the central part of a ring by a row of driving action gas jetting parts 3B by the action of these parts 3B annularly arranged in a condition such that a direction of driving force of the driving action is directed to the inner. Accordingly, the device, which holds the held object 1 in a completely contactless condition, prevents dust from adhering to the held object 1 by the contact, while the device, which applies even no impact force to the held object 1, prevents it from receiving damage and also from generating dust. |
